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플라즈마 화학 증착법에 의해 제조된 (Ti₁-xAlx)N 박막의 미세조직 및 기계적 특성에 관한 연구

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Authors
이동각
Advisor
이정중
Issue Date
1998
Publisher
서울대학교 대학원
Description
학위논문(석사)--서울대학교 대학원 :금속공학과,1998.
Language
Korean
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000075523

https://hdl.handle.net/10371/52288
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Materials Science and Engineering (재료공학부)Theses (Master's Degree_재료공학부)
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