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ICPCVD SiNx passivation을 이용한 GaAs metamorphic HEMT 소자의 DC 특성 개선에 관한 연구 : (A)study on the DC characteristics improvement of GaAs metamorphic HEMTs using ICPCVD SiNx passivation
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- Authors
- Advisor
- 서광석
- Issue Date
- 2007
- Publisher
- 서울대학교 대학원
- Keywords
- Metamorphic HEMT ; remote ICPCVD ; conformal ; DPL ; cutoff frequency(fT) ; maximum oscillation frequency(fmax)
- Description
- 학위논문(석사) --서울대학교 대학원 :전기. 컴퓨터공학부,2007.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000043858
https://hdl.handle.net/10371/52482
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