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Dopant effects in solid phase epitaxial growth of silicon : 실리콘의 고체상 단결정 성장속도에서의 dopant 효과
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- Authors
- Advisor
- 이홍희
- Issue Date
- 1997
- Publisher
- 서울대학교 대학원
- Description
- Thesis (master`s)--서울대학교 대학원 :화학공학과,1997.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000077107
https://hdl.handle.net/10371/58996
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