S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Chemical and Biological Engineering (화학생물공학부) Journal Papers (저널논문_화학생물공학부)
Surface Roughness Reducing Effect of Iodine Sources (CH3I, C2H5I) on Ru and RuO2 Composite Films Grown by MOCVD
- Kim, Jae Jeong; Jung, Doo Hwan; Kim, Moon Soo; Kim, Sang Hyun; Yoon, Do Young
- Issue Date
- Thin Solid Films 409 (2002) 28-32
- Files in This Item: There are no files associated with this item.