Publications
Detailed Information
Molecular Dynamics Analysis of Force Exerted on Stamp during a Thermal Nano Imprint Lithography : 나노 임프린트 리소그래피 공정 중 스탬프에 작용하는 힘의 분자동역학 해석
Cited 0 time in
Web of Science
Cited 0 time in Scopus
- Authors
- Advisor
- 이우일
- Issue Date
- 2010
- Publisher
- 서울대학교 대학원
- Keywords
- 나노 임프린트 리소그래피 ; nano imprint lithography (NIL) ; 분자동역학 ; molecular dynamics (MD) ; 힘 ; force
- Description
- Thesis(masters) --서울대학교 대학원 :기계항공공학부,2010.2.
- Language
- English
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033379
https://hdl.handle.net/10371/64845
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.