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Recessed Ohmic & Gate Process of AlGaNGaN HEMTs
Recessed Ohmic & Gate 공정을 통한 AlGaNGaN HEMTs 에 관한 연구

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Authors
성정민
Advisor
서광석
Issue Date
2010
Publisher
서울대학교 대학원
Keywords
GaNGaNAlGaNAlGaN리세스recess오믹ohmic게이트gateBCl3BCl3Cl2Cl2ICPICPHEMTpulsed I-VHEMT
Description
Thesis(masters) --서울대학교 대학원 :전기. 컴퓨터공학부,2010.2.
Language
English
URI
http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000033408

https://hdl.handle.net/10371/65232
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Electrical and Computer Engineering (전기·정보공학부)Theses (Master's Degree_전기·정보공학부)
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