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광 리소그래피에서 상 전환 및 그의 응용에 관한 연구 : The Study image transfer and application in optical lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이성묵 | - |
| dc.contributor.author | 임동규 | - |
| dc.date.accessioned | 2010-05-14T07:13:03Z | - |
| dc.date.available | 2010-05-14T07:13:03Z | - |
| dc.date.copyright | 1995. | - |
| dc.date.issued | 1995 | - |
| dc.identifier.uri | http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000084800 | kog |
| dc.identifier.uri | https://hdl.handle.net/10371/66163 | - |
| dc.description | 학위논문(박사)--서울대학교 대학원 :과학교육과,1995. | ko |
| dc.format.extent | viii, 150 장 | ko |
| dc.language.iso | ko | ko |
| dc.publisher | 서울대학교 대학원 | ko |
| dc.subject | image transfer | ko |
| dc.subject | optical lithography | ko |
| dc.subject | scalar differaction theory | ko |
| dc.subject | proximity effect | ko |
| dc.subject | dummy differaction mask | ko |
| dc.title | 광 리소그래피에서 상 전환 및 그의 응용에 관한 연구 | ko |
| dc.title.alternative | The Study image transfer and application in optical lithography | ko |
| dc.type | Thesis | - |
| dc.contributor.department | 과학교육과 | - |
| dc.description.degree | Doctor | ko |
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