S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Chemical and Biological Engineering (화학생물공학부) Journal Papers (저널논문_화학생물공학부)
Development of a miniaturized polymer electrolyte membrane fuel cell with silicon separators
- Kim, Jun-Yeop; Kwon, Oh Joong; Hwang, Sun-Mi; Kang, Moo Seong; Kim, Jae Jeong
- Issue Date
- Journal of Power Sources, 161 (2006) 432–436
- The fabrication process and electrochemical characterization of a miniaturized PEM fuel cell with silicon separators were investigated. Silicon
separators were fabricated with silicon fabrication technologies such as by photolithography, anisotropic wet etching, anodic bonding and physical
vapor deposition (PVD). A 400 m×230 m flow channel was made with KOH wet etching on the front side of a silicon separator, and then a
550 nm gold current collector and 350 nm TiNx thin film heater were respectively formed on the front side and the opposite side by PVD. Two
separators were assembled with the membrane electrode assembly (MEA) having a 4 cm2 active area for the single cell. With pure hydrogen and
oxygen under atmospheric pressure without humidification, the performance of the single fuel cell was measured. A single cell operation led to
generation of 203mWcm−2 at 0.6V at room temperature, which corresponded to 360mWcm−3 in terms of volumetric fuel cell power density,
with 20 ccm of gas flow rate of hydrogen and oxygen at the inlet.
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