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Development of a miniaturized polymer electrolyte membrane fuel cell with silicon separators
Cited 16 time in
Web of Science
Cited 19 time in Scopus
- Authors
- Issue Date
- 2006-10-20
- Publisher
- Elsevier
- Citation
- Journal of Power Sources, 161 (2006) 432–436
- Keywords
- Miniaturized fuel cell ; PEMFC ; Separator ; Silicon technology ; PtRu catalyst
- Abstract
- The fabrication process and electrochemical characterization of a miniaturized PEM fuel cell with silicon separators were investigated. Silicon
separators were fabricated with silicon fabrication technologies such as by photolithography, anisotropic wet etching, anodic bonding and physical
vapor deposition (PVD). A 400 m×230 m flow channel was made with KOH wet etching on the front side of a silicon separator, and then a
550 nm gold current collector and 350 nm TiNx thin film heater were respectively formed on the front side and the opposite side by PVD. Two
separators were assembled with the membrane electrode assembly (MEA) having a 4 cm2 active area for the single cell. With pure hydrogen and
oxygen under atmospheric pressure without humidification, the performance of the single fuel cell was measured. A single cell operation led to
generation of 203mWcm−2 at 0.6V at room temperature, which corresponded to 360mWcm−3 in terms of volumetric fuel cell power density,
with 20 ccm of gas flow rate of hydrogen and oxygen at the inlet.
- ISSN
- 0378-7753
- Language
- English
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