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Effect of 2-Mercapto-5-benzimidazolesulfonic Acid in Superconformal Cu Electroless Deposition
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Chang Hwa | - |
dc.contributor.author | Kim, Ae Rim | - |
dc.contributor.author | Koo, Hyo-Chol | - |
dc.contributor.author | Kim, Jae Jeong | - |
dc.date.accessioned | 2010-07-05T06:26:48Z | - |
dc.date.available | 2010-07-05T06:26:48Z | - |
dc.date.issued | 2009-04-21 | - |
dc.identifier.citation | Journal of The Electrochemical Society, 156(6), D207-D210 | en |
dc.identifier.issn | 0013-4651 | - |
dc.identifier.uri | https://hdl.handle.net/10371/68296 | - |
dc.description.abstract | Superconformal Cu electroless deposition is demonstrated in a CuSO4–EDTA–HCHO (where EDTA is ethylenediaminetetraacetic
acid) electrolyte containing 2-mercapto-5-benzimidazolesulfonic acid (MBIS). MBIS reveals a concentration-dependent effect in the deposition rate on planar substrates, whereby acceleration at low concentration and suppression at high concentration are evident. The half-cell reaction experiments show that the acceleration effect of MBIS is mainly associated with the cathodic reaction, while MBIS inhibits the oxidation of HCHO in the anodic reaction. The addition of MBIS offers preferential Cu electroless deposition at the bottom of 500 nm wide trenches. Poly(ethylene glycol) improved the surface roughness, maintaining the shape evolution of superconformal feature filling. | en |
dc.description.sponsorship | The authors are grateful to Dr. Thomas P. Moffat at NIST for
helpful discussions. This research was supported by the Nano R&D program through the Korea Science and Engineering Foundation funded by the Ministry of Education, Science and Technology (no. 2008-02857) | en |
dc.language.iso | en | en |
dc.publisher | Electrochemical Society | en |
dc.title | Effect of 2-Mercapto-5-benzimidazolesulfonic Acid in Superconformal Cu Electroless Deposition | en |
dc.type | Article | en |
dc.contributor.AlternativeAuthor | 이창화 | - |
dc.contributor.AlternativeAuthor | 김애림 | - |
dc.contributor.AlternativeAuthor | 구효철 | - |
dc.contributor.AlternativeAuthor | 김재정 | - |
dc.identifier.doi | 10.1149/1.3117343 | - |
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