Publications
Detailed Information
Characterization and Cu Electroless Plating of Laser-drilled Through-Wafer via-holes in GaN/Al2O3
Cited 2 time in
Web of Science
Cited 2 time in Scopus
- Authors
- Issue Date
- 2009-05-29
- Publisher
- Elsevier
- Citation
- Thin Solid Films 517 (2009) 3841 - 3843
- Keywords
- GaN ; Laser drilling ; Cu plating
- Abstract
- GaN on Al2O3 was drilled with a high power Nd:YAG laser. Micro-Raman spectroscopy showed that the
induced damage was nominal at about 15 μm from the edge of the drilled through-wafer via-holes. Cu
plating was accomplished using an electroless plating technique. FIB was employed to expose the interface
between electrolessly plated Cu and GaN on the sidewall of the drilled holes, followed by SEM/EDX to
confirm that the sidewall of the drilled holes was successfully covered with Cu. Cu electroless plating after
laser drilling has the potential to simplify device layout and improve device integration.
- ISSN
- 0040-6090
- Language
- English
- Files in This Item:
- There are no files associated with this item.
Item View & Download Count
Items in S-Space are protected by copyright, with all rights reserved, unless otherwise indicated.