Feasibility of Micro Electrode Array (MEA) Based on Silicone-Polyimide Hybrid for Retina Prosthesis

Abstract

Purpose: To adopt micropatterning technology in manufacturing silicone elastomer based microelectrode arrays for retinal stimulation, a silicone-polyimide hybrid microelectrode array was proposed and tested in vivo. Methods: Gold microelectrodes were created by semiconductor manufacturing technology based on polyimide, and were hybridized with silicone elastomer by spin coating. The stability of the hybrid between the two materials was flex and blister tested. The feasibility of the hybrid electrode was evaluated in rabbit eye by reviewing optical coherence tomography (OCT) findings after suprachoroidal implantation. Results: The flex test showed no dehiscence between the two materials for 24 h of alternative flexion and extension from -45.0° to +45.0°. During the blister test, delamination was observed at 8.33±1.36 psi of pressure stress; however, this property was improved to 11.50±1.04 psi by oxygen plasma treatment before hybridization. OCT examination revealed that, the implanted electrodes were safely located in the suprachoroidal space during the 4-week follow-up period. Conclusion: The silicone-polyimide hybrid microelectrode array showed moderate physical properties, which are suitable for in vivo application. Appropriate pretreatment before hybridization improved electrode stability. In vivo testing indicated that thiselectrode is suitable as a stimulation electrode in artificial retina.