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Properties of the doped polycrystalline silicon as site material for the micromachined silicon neural probe
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Oh, Seung Jae | - |
| dc.contributor.author | Song, Jong Keun | - |
| dc.contributor.author | An, Soon Kwan | - |
| dc.contributor.author | Kim, Sung June | - |
| dc.date.accessioned | 2009-08-26T03:16:50Z | - |
| dc.date.available | 2009-08-26T03:16:50Z | - |
| dc.date.issued | 2003-01 | - |
| dc.identifier.citation | J. Mater. Sci. Lett. 22(2) (2003) 131 | en |
| dc.identifier.issn | 0261-8028 (print) | - |
| dc.identifier.issn | 1573-4811 (online) | - |
| dc.identifier.uri | https://hdl.handle.net/10371/7847 | - |
| dc.description.sponsorship | This research was supported by Nano Bioelectronics
and Systems Research Center (NBS-ERC), KOSEF. | en |
| dc.language.iso | en | - |
| dc.publisher | Springer Verlag | en |
| dc.title | Properties of the doped polycrystalline silicon as site material for the micromachined silicon neural probe | en |
| dc.type | Article | en |
| dc.contributor.AlternativeAuthor | 오승재 | - |
| dc.contributor.AlternativeAuthor | 송종근 | - |
| dc.contributor.AlternativeAuthor | 안순관 | - |
| dc.contributor.AlternativeAuthor | 김성준 | - |
| dc.identifier.doi | 10.1023/A:1021866920811 | - |
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