S-Space College of Engineering/Engineering Practice School (공과대학/대학원) Dept. of Electrical and Computer Engineering (전기·정보공학부) Journal Papers (저널논문_전기·정보공학부)
Neural signal recording using microelectrode arrays fabricated on liquid crystal polymer material
- Lee, Choong Jae; Oh, Seung Jae; Song, Jong Keun; Kim, Sung June
- Issue Date
- Mater. Sci. Eng., C 24 (2004) 265-268
- Microelectrode arrays have been developed for simultaneous multi-channel recordings from nervous systems, typically using silicon
substrates. However, it has been known that it is difficult to meet the biocompatibility and durability requirements using silicon and other
dielectric materials (SiO2, Si3N4), due to environmental moisture and ions. Additional disadvantage of silicon being the rigid material makes
it hard to apply these materials in chronic recording situations.
Liquid Crystal Polymer (LCP) was recently introduced as a candidate material for electronic packaging purposes. The material acts as
efficient barrier against ions and moisture, a desirable feature for a substrate material of microelectrode arrays. In this paper, we report on the
neural recording performed using the LCP-based microelectrode arrays.
The cell adhesion on the new material was compared very favorably with that using silicon, SiO2, or polyimide material. The
microelectrode arrays were patterned with Ti (500 A ° )/Au (3500 A ° ) on the LCP film and were employed in both stimulation and recording
from rat sciatic nerve. The electrical characteristic of the recorded signal was as good as those using other substrate materials, proving this
material as an excellent candidate for next generation microelectrode arrays.
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