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Bandgap tuning of In0.53Ga0.47As/InP multiquantum well structure by impurity free vacancy diffusion using In0.53Ga0.47As cap layer and SiO2 dielectric capping

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dc.contributor.authorLee, Ju Han-
dc.contributor.authorSi, Sang Kee-
dc.contributor.authorMoon, Young Boo-
dc.contributor.authorYoon, Eui Joon-
dc.contributor.authorKim, Sung June-
dc.date.accessioned2009-09-08T06:57:51Z-
dc.date.available2009-09-08T06:57:51Z-
dc.date.issued1997-06-
dc.identifier.citationElectronics Letters, 1997, 33, (13), pp.1179-1181en
dc.identifier.issn0013-5194-
dc.identifier.urihttps://hdl.handle.net/10371/8978-
dc.description.abstractSiO, has been successfully used as the dielectric capping material
for bandgap tuning in TnGaAshP MQW for the first time where
the InGaAs cap layer is used simultaneously. The samples showed
large blue shifts of bandgap energy after RTA treatment (185 and
230meV at 750 and 850C, respectively). Samples with SO,-InP
or SiN,v-InGaAs cap layer combinations did not show significant
energy shifts.
en
dc.language.isoen-
dc.publisherInstitution of Engineering and Technology (IET)en
dc.titleBandgap tuning of In0.53Ga0.47As/InP multiquantum well structure by impurity free vacancy diffusion using In0.53Ga0.47As cap layer and SiO2 dielectric cappingen
dc.typeArticleen
dc.contributor.AlternativeAuthor이주한-
dc.contributor.AlternativeAuthor시상기-
dc.contributor.AlternativeAuthor문영부-
dc.contributor.AlternativeAuthor윤의준-
dc.contributor.AlternativeAuthor김성준-
dc.identifier.doi10.1049/el:19970761-
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