S-Space

Browse

Subject

Showing results 1 to 2 of 2

Issue Date	Title / Author(s) / Citation	File	Altmetrics
2006-05	Dependence of non-Prestonian behavior of ceria slurry with anionic surfactant on abrasive concentration and size in shallow trench isolation chemical mechanical polishing Kang, Hyun-Goo; Kim, Dae-Hyeong; Katoh, Takeo; Kim, Sung-Jun; Paik, Ungyu; Park, Jea-Gun Japanese Journal of Applied Physics, Vol.45 No.5A, pp.3896-3904	DOI
2006-09	Reduction of large particles in ceria slurry by aging and selective sedimentation and its effect on shallow trench isolation chemical mechanical planarization Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun Japanese Journal of Applied Physics, Vol.45 No.9A, pp.6790-6794	DOI