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Showing results 1 to 3 of 3

Issue Date Title / Author(s) / CitationFile
1995
다결정체 Al₂O₃에 대한 용융 Al의 적심거동
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2005
Effect of dispersant addition during ceria abrasive milling process on light point defect (LPD) formation after shallow trench isolation chemical mechanical polishing (STI-CMP)

Kang, Hyun-Goo; Katoh, Takeo; Kim, Dae-Hyeong; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.44 No.1-7, pp.L238-L241

DOI
2006
Dependence of non-Prestonian behavior of ceria slurry with anionic surfactant on abrasive concentration and size in shallow trench isolation chemical mechanical polishing

Kang, Hyun-Goo; Kim, Dae-Hyeong; Katoh, Takeo; Kim, Sung-Jun; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.45 No.5A, pp.3896-3904

DOI
1
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