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Highly stable Si MOSFET-type humidity sensor with ink-jet printed graphene quantum dots sensing layer

Cited 12 time in Web of Science Cited 12 time in Scopus
Authors

Jeong, Yujeong; Hong, Seongbin; Jung, Gyuweon; Shin, Wonjun; Park, Jinwoo; Kim, Donghee; Choi, Yong Seok; Bae, Jong-Ho; Hong, Byung Hee; Lee, Jong-Ho

Issue Date
2021-09
Publisher
Elsevier BV
Citation
Sensors and Actuators, B: Chemical, Vol.343, p. 130134
Abstract
This paper investigates humidity sensing characteristics of a silicon metal oxide semiconductor field effect transistor (Si MOSFET)-based humidity sensor having horizontal floating-gate (FG) interdigitated with controlgate (CG). The sensing material of the humidity sensor is graphene quantum dots (GQDs), deposited locally on the interdigitated CG-FG area by an ink-jet printing method using a small amount of the GQDs solution. The humidity sensing characteristics of the sensor are measured as a parameter of relative humidity (RH). The response of the humidity sensor is 78 % to the humid air of 81.3 % RH. We also adopt a pulsed pre-bias method to improve the response and recovery characteristics of the humidity sensor. The response and recovery characteristics of the sensor can be improved 30 % and 40 % respectively by applying a pre-bias of 2 V and -1 V to the CG. In all relative humidity ranges, the FET-type humidity sensor has highly stable and reproducible characteristics in long-term measurements for 5 months.
ISSN
0925-4005
URI
https://hdl.handle.net/10371/178073
DOI
https://doi.org/10.1016/j.snb.2021.130134
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  • College of Natural Sciences
  • Department of Chemistry
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