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Modeling of Lateral Migration Mechanism of Holes in 3D NAND Flash Memory Charge Trap Layer during Retention Operation

Cited 3 time in Web of Science Cited 4 time in Scopus
Authors

Park, Jaeyeol; Shin, Hyungcheol

Issue Date
2019-06
Publisher
IEEE
Citation
2019 SILICON NANOELECTRONICS WORKSHOP (SNW), pp.61-62
Abstract
In this paper, we analyzed lateral migration mechanism of holes (LM) in 3D NAND Flash memory during retention operation. Retention characteristics were investigated using Technology Computer-Aided Design (TCAD) simulation and modeled using Weibull cumulative distribution function (WCD). Time-constant (tau) at various temperatures were extracted through the modeled equation. Finally, the activation energy (E-a) of LM was extracted by applying to the Arrhenius equation.
ISSN
2161-4636
URI
https://hdl.handle.net/10371/186746
DOI
https://doi.org/10.23919/SNW.2019.8782975
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