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Slingshot Pull-In Operation for Low-Voltage Nanoelectromechanical Memory Switches
Cited 4 time in
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Cited 4 time in Scopus
- Authors
- Issue Date
- 2019-04
- Citation
- IEEE Transactions on Electron Devices, Vol.66 No.4, pp.2040-2043
- Abstract
- A novel "slingshot" pull-in operation is proposed to lower the operation voltage (V-DD) of nanoelectromechanical (NEM) memory switches for the implementation of monolithic 3-D (M3D) CMOS-NEM hybrid reconfigurable logic (RL) circuits. According to the theoretical calculation and experimental data, the proposed "slingshot" pull-in operation lowers V-DD of the NEM memory switches by similar to 0.84 times. It contributes to the overall V-DD reduction and chip density boost of M3D CMOS-NEM RL circuits.
- ISSN
- 0018-9383
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