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Modeling of Triangular Sacrificial Layer Residue Effect in Nano-Electro-Mechanical Nonvolatile Memory
Cited 1 time in
Web of Science
Cited 1 time in Scopus
- Authors
- Issue Date
- 2013-05
- Publisher
- Oxford University Press
- Citation
- IEICE Transactions on Electronics, Vol.E96.C No.5, pp.714-717
- Abstract
- A modified modeling of residue effect on nano-electromechanical nonvolatile memory (NEMory) is presented for considering wet etching process. The effect of a residue under the cantilever is investigated for the optimization. The feasibility of the proposed model is investigated by finite element analysis simulations.
- ISSN
- 0916-8524
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