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Effect of Pore Generating Materials on the Electrical and Mechanical Properties of Porous Low-k Films

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Authors

Kim, Suhan; Char, Kookheon; Hahn, Junhee; Lee, Jin-Kyu; Yoon, Do Yeung; Rhee, Hee-Woo; Jin, Moon Young

Issue Date
2007
Publisher
한국고분자학회 = The Polymer Society of Korea
Citation
Macromol. Res., 15, 1 (2007)
ISSN
1598-5032
Language
English
URI
http://kiss.kstudy.com/search/detail_view.asp?key=2595137

https://hdl.handle.net/10371/5881
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