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Superfilling Evolution in Cu Electrodeposition; Dependence on the Aging Time of the Accelerator

Cited 55 time in Web of Science Cited 60 time in Scopus
Authors
Kim, Soo-Kil; Kim, Jae Jeong
Issue Date
2004-08-04
Publisher
Electrochemical Society
Citation
Electrochemical and Solid-State Letters, 7 (9), C98-C100
Keywords
copperelectrodepositionageingorganic compoundselectrolytesultraviolet spectravisible spectra
Abstract
Interesting phenomena were observed during an investigation on the accelerating effects of 3-mercapto-1-propane sulfonic acid
~MPSA!, i.e., different aging times of MPSA result in different filling profiles. When MPSA was added to the electrolyte
immediately before electrodeposition, subconformal deposits appeared, whereas MPSA aged over 12 h enabled superfilling. From
UV-visible analysis, over 99% MPSA was converted to bis~3-sulfopropyl!disulfide ~SPS! within 12 h through the reaction with
Cu21, which means that SPS was, in terms of visible superfilling, the real accelerator. This arose from the fact that SPS
experienced adsorption first, while MPSA underwent Cu21 reduction first at the trench entrance.
ISSN
1099-0062
Language
English
URI
https://hdl.handle.net/10371/66132
DOI
https://doi.org/10.1149/1.1777552
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College of Engineering/Engineering Practice School (공과대학/대학원)Dept. of Chemical and Biological Engineering (화학생물공학부)Journal Papers (저널논문_화학생물공학부)
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