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광 리소그래피에서 상 전환 및 그의 응용에 관한 연구 : The Study image transfer and application in optical lithography
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- Authors
- Advisor
- 이성묵
- Issue Date
- 1995
- Publisher
- 서울대학교 대학원
- Keywords
- image transfer ; optical lithography ; scalar differaction theory ; proximity effect ; dummy differaction mask
- Description
- 학위논문(박사)--서울대학교 대학원 :과학교육과,1995.
- Language
- Korean
- URI
- http://dcollection.snu.ac.kr:80/jsp/common/DcLoOrgPer.jsp?sItemId=000000084800
https://hdl.handle.net/10371/66163
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