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Issue Date | Title / Author(s) / Citation | File | Altmetrics |
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1991-05 | J. Vac. Sci. Technol. A 9, 1283 (1991) | DOI | |
2002-12 | The Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 21, 33-38 | DOI | |
2003-03 | J. Vac. Sci. Technol. B 21, 800 (2003) | DOI | |
2004 | Damascene Cu electrodeposition on metal organic chemical vapor deposition-grown Ru thin film barrier J. Vac. Sci. Technol. B 22, 2649 (2004) | DOI | |
2004-01 | Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 22(1), 180-184 | DOI | |
2004-05 | Journal of Vacuum Science and Technology a Vacuum Surfaces and Films 22(4), 1120-1123 | DOI | |
2005-03 | Journal of Vacuum Science and Technology B Microelectronics and Nanometer Structures 23(2), 475-479 | DOI | |
2005-09 | J. Vac. Sci. Technol. B 23, 1970 (2005) | DOI |
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