Browse

S-Space

Browsing by Subject STI CMP

Jump to a point in the index
Or type in a year

  • Sort by
  • In order
  • Results/Page
  • Authors/record

Showing results 1 to 3 of 3

Issue Date Title / Author(s) / CitationFile
2005
Agglomerated large particles under various slurry preparation conditions and their influence on shallow trench isolation chemical mechanical polishing

Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.44 No.11, pp.7770-7776

DOI
2005
The effect of cerium precursor agglomeration on the synthesis of ceria particles and its influence on shallow trench isolation chemical mechanical polishing performance

Kim, Dae-Hyeong; Kim, Sang-Kyun; Kang, Hyun-Goo; Park, Jea-Gun; Paik, Ungyu

Japanese Journal of Applied Physics, Vol.44 No.12, pp.8422-8426

DOI
2006
Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance

Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.45 No.6A, pp.4893-4897

DOI
1
RSS 1.0 RSS 2.0 Atom

Seoul National University Library, 1 Gwanak-ro, Gwanak-gu, Seoul 08826, Korea TEL: 02-880-5567 Email: s-space@snu.ac.kr

Hello

Browse

News About S-Space Seoul National University Library MY DSPACE LOGOUT LOGIN