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Showing results 1 to 8 of 8
Issue Date
Title / Author(s) / Citation
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1998
Cu 배선공정에서 확산방지막으로서 TiN 박막에 대한 연구
박기철
link
2004
Advanced metallization for high performance devices using superconformal Cu electrodeposition
김수길
link
2007
Reliability issues for high performance Cu interconnects :
김기수
link
2007
(The)nanostructure and the properties of superhard TaN thins films deposited by plasma-assisted sputtering
이기락
link
2008
(The) microstructure and the properties of TaNx diffusion barrier deposited by inductively coupled plasma assisted sputtering
김성만
link
2008
Study on the initial steps in Ag electroless and electrodeposition
구효철
link
2009
Nanoscale order, thermal conductivity of Ge2Sb2Te5 alloy and its application for PRAM device
권민호
link
2021-02
The Effect of Interfacial Layer on the Electrical Properties of Atomic-Layer-Deposited p-Type SnO Thin-Film Transistors
장윤진
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1