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Browsing by Author Kim, Sang-Kyun

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Showing results 1 to 4 of 4

Issue Date Title / Author(s) / CitationFile
2005
Agglomerated large particles under various slurry preparation conditions and their influence on shallow trench isolation chemical mechanical polishing

Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.44 No.11, pp.7770-7776

DOI
2005
The effect of cerium precursor agglomeration on the synthesis of ceria particles and its influence on shallow trench isolation chemical mechanical polishing performance

Kim, Dae-Hyeong; Kim, Sang-Kyun; Kang, Hyun-Goo; Park, Jea-Gun; Paik, Ungyu

Japanese Journal of Applied Physics, Vol.44 No.12, pp.8422-8426

DOI
2006
Effect of calcination process on synthesis of ceria particles, and its influence on shallow trench isolation chemical mechanical planarization performance

Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.45 No.6A, pp.4893-4897

DOI
2006
Reduction of large particles in ceria slurry by aging and selective sedimentation and its effect on shallow trench isolation chemical mechanical planarization

Kim, Dae-Hyeong; Kang, Hyun-Goo; Kim, Sang-Kyun; Paik, Ungyu; Park, Jea-Gun

Japanese Journal of Applied Physics, Vol.45 No.9A, pp.6790-6794

DOI
1
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