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Showing results 1 to 31 of 31

Issue Date	Title / Author(s) / Citation	File
2005	Characteristics of atmospheric dielectric barrier discharge plasma for photo-resistor etching 송상헌	link
2005	Algorithm for analysis of electron energy distribution function from Langmuir probe data using wavelet transform 우제헌	link
2007	대기압 플라즈마를 한 식각 반응기 개발 정수연	link
2008	Study on etching characteristics and mechanism using the blower type atmospheric pressure plasma 권호철	link
2008	Development of in-situ plasma density monitoring method in atmospheric pressure dielectric barrier discharge 이승훈	link
2009	Plasma treatment effect on multi-walled carbon nanotube growth in plasma enhanced chemical vapor deposition 허성렬	link
2009	Development of real-time plasma monitoring method using AC driven electrostatic probe 최명선	link
2010	Formation of conical shape multi-walled carbon nanotube tip using plasma irradiation 임선택	link
2010	Study on micro plasma discharge mechanism in liquid electrolyte 윤성영	link
2010-09	Effects of shroud gas injection on material properties of tungsten layers coated by plasma spraying Kim, Sungwoo; Choi, Sooseok; Kim, Gon-Ho; Hong, Sang Hee Thin Solid Films 518 (2010) 6369-6372	DOI
2012-02	Effect of Arc Operating Mode of Atmospheric Pressure Plasma Torch on Coating Property 진영길	link
2012-08	열플라즈마를 이용한 나노 분말 합성에서 분말의 온도가 열전달 특성에 미치는 영향 이진영	view file
2013-02	Dynamics of Recovering Sheath and Presheath in a Collisionless Plasma 최재명	view file
2013-08	Ar-Xe 혼합 플라즈마의 쉬스와 프리쉬스 사이에 형성된 전이영역에서 이온의 운동 김남균	view file
2014-02	Characteristics of Helium Atmospheric Pressure Plasma Bullet Propagation 김수정	view file
2014-08	삼중 주파수 운전 용량 결합형 장치에서 플라즈마 광진단을 이용한 전력 의존 식각 공정 제어 연구 정상민	view file
2015-02	Investigation of Deuterium Plasma Property Variation by Carbon Impurity from Graphite 임선택	view file
2015-02	Surface Damage Mechanism of Tungsten by Heat Flux and Deuterium Ion Irradiation in Nuclear Fusion 김현수	view file
2015-02	Characteristics of Hydrogen Negative Ion Production depending on Electron Energy Distributions in Inductively Coupled Plasmas 허성렬	view file
2015-02	Development of Plasma Information Based Virtual Metrology (PI-VM) for Plasma-assisted Processes 박설혜	view file
2015-02	Generation Mechanism of Hydroxyl Radical in Electrolyte Streamer Discharge 윤성영	view file
2016-06	헬륨 대기압 유전체 격벽 방전기의 타운젠트?글로우 방전 모드 전이 연구 배병준; 김남균; 윤성영; 신준섭; 김곤호 반도체디스플레이기술학회지, Vol.15 No.2, pp.26-31
2016-08	Analysis of Radio Frequency Induction Plasma Process for Mass Production of Ni Nanoparticles 남준석	view file
2017-02	저주파 인가 대기압 유전체 격벽 헬륨 플라즈마의 방전 특성 연구 배병준	view file
2018-02	Development of Hydrogen Retention Model Based on Plasma-Tungsten Interaction Analysis 진영길	view file
2018-08	Development of Plasma Information Based Virtual Metrology (PI-VM) for Drifting Deposition Process 노현준	view file
2019-02	Plasma Information-Virtual Metrology (PI-VM) on Interlayer Formation of Plasma-Enhanced Atomic Layer Deposition 이진영	view file
2019-02	Investigation of Generalized Bohm Sheath Criterion for Collisional, Magnetized and RF Plasmas 김남균	view file
2021	VHF-CCP 설비에서 Ar/SF6 플라즈마 분포가 Si 식각 균일도에 미치는 영향 분석 임성재; 이인규; 이하늘; 손성현; 김곤호 반도체디스플레이기술학회지, Vol.20 No.4, pp.72-77
2022	Development of Plasma Information Based Advanced Process Controller (PI-APC) for Plasma Etch Processes 유상원	view file link
2023	Advanced Process Control Using Plasma Information (PI-APC) for Improving Edge Uniformity of Capacitively Coupled Plasma 송재민	view file link